The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 21, 2003
Filed:
May. 07, 2001
Satoshi Nakashima, Kikuchi-gun, JP;
Wataru Okase, Tsukui-gun, JP;
Takenobu Matsuo, Tsukui-gun, JP;
Tameyasu Hyakuzuka, Tsukui-gun, JP;
Yasushi Yagi, Tsukui-gun, JP;
Yoshiyuki Harima, Tsukui-gun, JP;
Jun Yamauchi, Tsukui-gun, JP;
Hiroki Taniyama, Tosu, JP;
Kyungho Park, Kawasaki, JP;
Yoshitsugu Tanaka, Nirasaki, JP;
Yoshinori Kato, Kuwana, JP;
Hiroshi Sato, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
Liquid treatment units are disposed in multi-tiers surrounding a main-arm . Among liquid treatment units, plating units M through M are disposed on a lower tier side, and a unit for post-treatment process such as a cleaning unit where a cleaner atmosphere is necessary is disposed on an upper tier side. Thereby, an improvement in an area efficiency and the formation and maintenance of a clean atmosphere can be simultaneously obtained.