This inventor holds 13 USPTO granted patents and 4 published patent applications and 9 EPO patents. Top assignees: Horiba, Ltd., Horiba Stec, Co., Ltd., Horiba Stec, Co., Ltd.. Active years: 2020-2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
12 out of 724 
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1 out of 203 Years Active: 2020-2026
Title: Kyoji Shibuya: Innovator in Gas Analysis Technology
Introduction
Kyoji Shibuya is a prominent inventor based in Kyoto, Japan. He has made significant contributions to the field of gas analysis technology, particularly in applications related to semiconductor manufacturing. With a total of 13 patents to his name, Shibuya's work has had a substantial impact on the industry.
Latest Patents
Shibuya's latest patents include a gas analysis device and gas analysis method. This innovative device measures the concentration or partial pressure of halides in gases used during semiconductor manufacturing processes. It features a gas cell for introducing the material or by-product gas, a laser light source that modulates the wavelength, a light detector for capturing transmitted laser light, and a signal processing unit that calculates the halide concentration based on the light absorption signal. Another notable invention is an analysis device designed to accurately measure the concentration of target components in samples. This device utilizes a light source to output reference light, a photodetector to measure sample light intensity, and a concentration calculating unit that determines the corrected concentration of the target component.
Career Highlights
Throughout his career, Kyoji Shibuya has worked with notable companies such as Horiba, Ltd. and Horiba Stec, Co., Ltd. His experience in these organizations has allowed him to refine his expertise in gas analysis technologies and contribute to advancements in the field.
Collaborations
Shibuya has collaborated with esteemed colleagues, including Katsumi Nishimura and Kensuke Fukushiro. These partnerships have fostered innovation and have been instrumental in the development of his patented technologies.
Conclusion
Kyoji Shibuya's contributions to gas analysis technology exemplify his dedication to innovation in the semiconductor industry. His patents reflect a commitment to enhancing measurement accuracy and efficiency in gas analysis applications.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile