Location History:
- Sagamihara, JP (1999)
- Tsukui-gun, JP (2006)
- Tokyo, JP (2009)
- Minato-ku, JP (2009)
- Miyagi, JP (2022 - 2023)
Company Filing History:
Years Active: 1999-2023
Title: Innovations by Kyo Tsuboi: A Pioneer in Plasma Processing Technology
Introduction
Kyo Tsuboi, an esteemed inventor based in Tokyo, Japan, has made significant contributions to the field of plasma processing technology. With a remarkable portfolio that includes seven patents, Tsuboi's innovations have paved the way for advancements in substrate processing and cooling systems within plasma environments.
Latest Patents
Among Tsuboi's latest patents, the "Plasma Processing Apparatus" stands out as a revolutionary device designed for efficient plasma processing in a depressurizable inner space. This patent details an innovative apparatus featuring a chamber with an inner space that supports a substrate during processing. The design includes one or more first members partially exposed to a depressurized environment, and corresponding second members in contact with these first members while existing in an atmospheric pressure environment. Additionally, this apparatus ensures effective cooling via specialized feeders supplying coolant to cavities formed within the second members. Another notable invention is the substrate processing device that focuses on a mounting stage equipped with an electrostatic chuck to securely hold substrates and an edge ring designed to enhance the processing efficiency while managing the heat distribution.
Career Highlights
Kyo Tsuboi's professional journey has been defined by his tenure at Tokyo Electron Limited, a leading company in the semiconductor and electronic device manufacturing industry. His innovative spirit and technical prowess have led to the development of cutting-edge technologies that enhance plasma processing capabilities.
Collaborations
Throughout his career, Tsuboi has collaborated with esteemed colleagues, including Takashi Fuse and Tadashi Kotsugi. Together, they have tackled complex challenges in the realm of plasma processing, driving forward the innovations that mark their contributions to the field.
Conclusion
Kyo Tsuboi's impact on plasma processing technology is undeniable. With a series of patents that reflect his ingenuity, he continues to be a vital force in advancing industry standards. His work not only highlights the importance of innovation in technology but also underscores the collaborative efforts that fuel advancements in scientific research and engineering.