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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11538668 B1

PDFFull Text
Date of Patent:
Dec. 27, 2022

Filed:

May. 29, 2019

Mounting stage, substrate processing device, and edge ring

Applicant:

Tokyo Electron Limited, Tokyo, JP;

Inventors:

Yasuharu Sasaki, Miyagi, JP;

Kyo Tsuboi, Miyagi, JP;

Tomoya Kato, Miyagi, JP;

Shoichiro Matsuyama, Miyagi, JP;

Assignee:

TOKYO ELECTRON LIMITED, Tokyo, JP;

Attorneys:

Nath, Goldberg & Meyer

Jerald L. Meyer

Tanya E. Harkins

Primary Examiner:

Ram N Kackar

Assistant Examiner:

Laureen Chan

Int. Cl.
CPC ...
H01J 37/32 (2006.01); H01L 21/67 (2006.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32642 (2013.01); H01J 37/32724 (2013.01); H01L 21/67069 (2013.01); H01L 21/6833 (2013.01); H01J 2237/3341 (2013.01); H01J 2237/3344 (2013.01);
Abstract

Provided is a mounting stage on which a substrate to be subjected to a plasma process is mounted. The mounting stage includes: an electrostatic chuck configured to attract the substrate and an edge ring disposed around the substrate; and supply holes through which a heat medium is supplied to a space between the electrostatic chuck and the edge ring. A groove is provided in at least one of the edge ring and the mounting stage, and the groove is not in communication with the supply holes.

Find Patent Forward Citations

Sasaki, Yasuharu. (2022). Mounting stage, substrate processing device, and edge ring (U.S. Patent No. 11538668). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11538668

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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