Company Filing History:
Years Active: 2022
Title: Tomoya Kato: Innovator in Substrate Processing Technology
Introduction
Tomoya Kato is a prominent inventor based in Miyagi, Japan. He has made significant contributions to the field of substrate processing technology. His innovative work has led to the development of a unique mounting stage that enhances plasma processing efficiency.
Latest Patents
Tomoya Kato holds a patent for a mounting stage, substrate processing device, and edge ring. This invention provides a mounting stage on which a substrate can be subjected to a plasma process. The mounting stage features an electrostatic chuck designed to attract the substrate, along with an edge ring positioned around it. Additionally, the design includes supply holes that allow a heat medium to be delivered to the space between the electrostatic chuck and the edge ring. Notably, a groove is incorporated in at least one of the edge ring and the mounting stage, which is not in communication with the supply holes. This innovative design enhances the overall functionality of the substrate processing device.
Career Highlights
Tomoya Kato is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work at the company has allowed him to focus on advancing technologies that improve substrate processing methods. With a patent portfolio that includes 1 patent, Kato continues to push the boundaries of innovation in his field.
Collaborations
Throughout his career, Tomoya Kato has collaborated with notable colleagues such as Yasuharu Sasaki and Kyo Tsuboi. These partnerships have fostered a creative environment that encourages the exchange of ideas and technological advancements.
Conclusion
Tomoya Kato's contributions to substrate processing technology exemplify his commitment to innovation. His patent for a mounting stage and substrate processing device showcases his ability to solve complex challenges in the semiconductor industry. As he continues to work at Tokyo Electron Limited, Kato remains a key figure in advancing substrate processing technologies.