This inventor holds 3 USPTO granted patents. Top assignee: Kla Corporation. Active years: 2026.
Company Filing History:
Years Active: 2026
Title: Kyeongeun Ko: Innovator in EUV Lithography
Introduction
Kyeongeun Ko is a prominent inventor based in Gyeonggi-do, South Korea. He has made significant contributions to the field of lithography, particularly in the area of extreme ultraviolet (EUV) lithography. With a total of 3 patents to his name, Ko's work focuses on improving the calibration, prediction, and control of stochastic defects in lithographic processes.
Latest Patents
Kyeongeun Ko's latest patents include innovative methods to address stochastic defects in EUV lithography. One of his patents describes a method that involves receiving an initial probability of occurrence of a stochastic defect over an inspection area of a workpiece. The locations of these defects are sorted by their initial probabilities, and a cumulative expected defect count is determined. This count is then normalized to represent a fraction of the total expected defect count. The method also identifies defect locations that exceed a threshold of total stochastic defects.
Another patent by Ko outlines a process where, using the initial probability of occurrence, one or more defects within the inspection area are imaged using either an optical tool or an electron beam tool. A probability of occurrence for each defect location is generated, and these locations are grouped into probability bins. The consistency between the initial probabilities and observed results is assessed, allowing for model tuning based on this consistency.
Career Highlights
Kyeongeun Ko is currently employed at Kla Corporation, where he continues to develop cutting-edge technologies in lithography. His expertise in stochastic defect management has positioned him as a key player in the advancement of EUV lithography techniques.
Collaborations
Ko has collaborated with notable colleagues in his field, including Anatoly Burov and Janez Krek. These collaborations have further enhanced his research and development efforts in lithography.
Conclusion
Kyeongeun Ko is a distinguished inventor whose work in EUV lithography has led to significant advancements in the management of stochastic defects. His innovative methods and collaborations continue to shape the future of lithographic technology.