The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 17, 2026
Filed:
Sep. 24, 2024
Kla Corporation, Milpitas, CA (US);
Pradeep Vukkadala, Santa Clara, CA (US);
Cao Zhang, Ann Arbor, MI (US);
Anatoly Burov, Austin, TX (US);
Guy Parsey, Ann Arbor, MI (US);
Kyeongeun Ko, Gyeonggi-do, KR;
Sergei G. Bakarian, Mountain View, CA (US);
Janez Krek, Milan, MI (US);
Kunlun Bai, Campbell, CA (US);
Craig Higgins, Cedar Park, CA (US);
John S. Graves, Austin, TX (US);
Mark D. Smith, San Jose, CA (US);
John J. Biafore, North Scituate, RI (US);
KLA Corporation, Milpitas, CA (US);
Abstract
An initial probability of occurrence of a stochastic defect over an inspection area of a workpiece is received. All locations of the stochastic defects are sorted by the initial probability of occurrence. A cumulative expected defect count is determined and the cumulative expected defect count is normalized to be a fraction of a total expected defect count. A number of defect locations is determined to capture potential stochastic defects above a threshold of total stochastic defects.