The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 24, 2026
Filed:
Sep. 24, 2024
Kla Corporation, Milpitas, CA (US);
Pradeep Vukkadala, Santa Clara, CA (US);
Cao Zhang, Ann Arbor, MI (US);
Anatoly Burov, Austin, TX (US);
Guy Parsey, Ann Arbor, MI (US);
Kyeongeun Ko, Gyeonggi-do, KR;
Sergei G. Bakarian, Mountain View, CA (US);
Janez Krek, Milan, MI (US);
Kunlun Bai, Campbell, CA (US);
Craig Higgins, Cedar Park, CA (US);
John S. Graves, Austin, TX (US);
Mark D. Smith, San Jose, CA (US);
John J. Biafore, North Scituate, RI (US);
KLA Corporation, Milpitas, CA (US);
Abstract
Based on an initial probability of occurrence of a stochastic defect over a layout of a workpiece, a subset of locations on the workpiece are selected where the initial probability is above a threshold. The subset of locations are grouped by pattern shapes. An expected defect count is determined for each of the pattern shapes. A subset of the pattern shapes is then selected for repair.