Kwang-Myung Lee

Title: **The Innovative Contributions of Kwang-Myung Lee**

Introduction

Kwang-Myung Lee, an accomplished inventor based in Suwon, South Korea, has made significant strides in the field of vacuum processing technologies. With a total of four patents to his name, Lee's work has contributed to advancements in semiconductor manufacturing and vacuum pump design.

Latest Patents

Among Lee's latest patents is an innovative etching apparatus and method. This cutting-edge vacuum processing apparatus features a vacuum processing tank, a first gas introduction section designed to introduce a first processing gas in a radical state directly to a semiconductor wafer, and a second gas introduction section that brings in a second processing gas to react with the first. The configuration of two shower nozzles on either side of the introduction pipe enhances the efficiency of the etching process. This technology aims to achieve high-speed processing while ensuring uniformity in the treatment of multiple processing objects.

Another notable patent is for a vacuum pump equipped with a rotation body cleaning unit. This design includes a case with rotation guide holes and a rotation shaft that features lobes spaced at intervals for improved functionality. The integrated cleaning part thoroughly maintains the rotation body by operating in the space between the lobes, demonstrating Lee's commitment to innovation in vacuum technology.

Career Highlights

Kwang-Myung Lee has had a distinguished career, having worked for prominent companies such as Samsung Electronics and Ulvac, Inc. His contributions at these organizations have been pivotal in advancing the performance and efficiency of vacuum processing technologies.

Collaborations

Throughout his career, Lee has collaborated with esteemed colleagues, including Seung-Ki Chae and Ki-Young Yun. These partnerships have facilitated the exchange of ideas and expertise, further enriching Lee's contributions to the industry.

Conclusion

Kwang-Myung Lee stands out as a significant figure in the realm of inventions related to vacuum processing technologies. His innovative patents not only reflect his technical expertise but also demonstrate his dedication to pushing the boundaries of what's possible in semiconductor manufacturing. As the industry continues to evolve, Lee's contributions will undoubtedly play a crucial role in shaping the future of vacuum processing.