Company Filing History:
Years Active: 1997-2012
Title: Kuniaki Maejima: Innovator in Semiconductor Polishing Technologies
Introduction
Kuniaki Maejima is a notable inventor based in Tokyo, Japan. He has made significant contributions to the field of semiconductor polishing technologies. With a total of 3 patents to his name, Maejima's work focuses on enhancing the efficiency and effectiveness of polishing compositions used in semiconductor manufacturing.
Latest Patents
One of Maejima's latest patents is a polishing composition for semiconductor wafers and a polishing method. This invention relates to a polishing composition that excels in polishing properties. The composition comprises colloidal silica made of non-spherical silica particles, which have a long axis to short axis ratio of 1.5 to 15. This innovative polishing composition provides a remarkably high polishing rate compared to those using spherical colloidal silica, while also ensuring good mirror-polishing without causing scratches. Additionally, the low alkali metal content reduces adverse effects on semiconductor wafers, such as residual abrasives after polishing.
Another significant patent by Maejima is for a polishing composition for substrates that include metal wiring formed on semiconductor wafers. This invention allows for a high polishing rate without scratching the wiring metal. The composition consists of an acid and an aqueous medium dispersion containing positively charged silica particles with an amino group-containing silane coupling agent bonded to their surface. The polishing composition maintains a pH of 2 to 6, which is crucial for its effectiveness.
Career Highlights
Throughout his career, Kuniaki Maejima has worked with prominent companies in the chemical and semiconductor industries. Notable among these are Nippon Chemical Industrial Co., Ltd. and Speedfam Co., Ltd. His experience in these organizations has contributed to his expertise in developing advanced polishing technologies.
Collaborations
Maejima has collaborated with several professionals in his field, including Shinsuke Miyabe and Masahiro Izumi. These collaborations have likely enriched his research and development efforts, leading to innovative solutions in semiconductor polishing.
Conclusion
Kuniaki Maejima stands out as an influential inventor in the semiconductor industry, particularly in polishing technologies. His patents reflect a commitment to improving the efficiency and quality of semiconductor manufacturing processes. His contributions continue to impact the field positively.