Company Filing History:
Years Active: 1992-2016
Title: The Innovative Contributions of Kozo Kai
Introduction
Kozo Kai, an accomplished inventor based in Fuchu, Japan, has made significant strides in the field of substrate processing systems, holding three patents to his name. His work is pivotal, particularly in improving the efficiency and effectiveness of semiconductor manufacturing processes.
Latest Patents
Among his notable inventions are groundbreaking patents that focus on substrate processing systems and methods. His latest patent relates to a substrate processing system and a substrate position correction method. In this innovation, a mapping operation is performed by a mapping device to assess position information for wafers. The technology intelligently determines whether a wafer's position is abnormal and employs a sequence involving the closing and opening of a FOUP door based on this assessment. Importantly, it counts the frequency of these operations and repeats the processing steps until the conditions are optimal.
Another essential patent involves a method for lowering the temperature of a substrate table, achieved through a specialized substrate processing system. This system includes a primary substrate table and processing chambers that facilitate the lowering of temperatures through a series of transfers between tables, effectively absorbing heat during the process.
Career Highlights
Kozo Kai is currently affiliated with Tokyo Electron Limited, a prominent company in the semiconductor equipment manufacturing sector. His contributions to the field reflect a strong commitment to advancing technology and enhancing manufacturing efficiency.
Collaborations
Throughout his career, Kozo Kai has worked alongside talented colleagues, including Seishi Murakami and Susumu Kato. These collaborations have likely fostered innovation and creativity in their projects, enabling them to tackle complex challenges in the industry.
Conclusion
Kozo Kai exemplifies the spirit of innovation and dedication within the semiconductor technology sector. His patents not only highlight his inventiveness but also contribute to the future of substrate processing systems, solidifying his legacy as a vital player in the field of technology.