Method of lowering temperature of substrate table, computer-readable storage medium, and substrate processing system

Abstract

A method of lowering a temperature of a substrate table uses a substrate W processing system including a first substrate table; one or more processing chambers, in each of which the first substrate tableis disposed, the processing chamber being configured to perform a predetermined process, with the substrate being placed on the first substrate table; a substrate transfer apparatusconfigured to transfer the substrate to the processing chamber; a transfer chamber in which the substrate transfer apparatusis disposed; and a second substrate table configured to cool the substrate. The method of lowering a temperature of a substrate table comprises the steps of first transfer in which the substrate W placed on the first substrate tableis transferred to the second substrate table by the substrate transfer apparatus, and second transfer in which the substrate placed on the second substrate table is transferred to the first substrate table. By repeating the step of first transfer and the step of second transfer, a heat of the first substrate tableis absorbed by the substrate W placed on the first substrate table, so that a temperature of the first substrate tableis lowered.