Kouki Suzuki is a prominent inventor based in Nirasaki, Japan. He has made significant contributions to the field of substrate technology, holding a total of 9 patents. His work focuses on enhancing the efficiency and effectiveness of substrate holders and film forming apparatuses.

Latest Patents

One of his latest patents is a substrate holder that features a stage made of dielectric material, designed to support a substrate. This innovative holder includes an attraction electrode that electrostatically attracts the substrate and a heater to maintain the stage's temperature. By applying a DC voltage to the attraction electrode, the substrate is securely attached to the stage's surface through a Johnsen-Rahbek force. The design incorporates an annular close contact area for optimal substrate contact and a groove for accumulating conductive deposition film.

Career Highlights

Kouki Suzuki is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing industry. His work has been instrumental in advancing technologies that are critical for modern electronics.

Collaborations

Throughout his career, Kouki has collaborated with notable colleagues, including Sumi Tanaka and Jun Yamashita. These partnerships have fostered innovation and contributed to the development of cutting-edge technologies in the field.

Conclusion

Kouki Suzuki's contributions to substrate technology and his impressive portfolio of patents highlight his role as a key innovator in the industry. His work continues to influence advancements in semiconductor manufacturing and related fields.

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