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For the Inventor, By the Inventor

Utsunomiya, Japan

Kohei Yamada

This inventor holds 6 USPTO granted patents. Top assignee: Canon Kabushiki Kaisha. Active years: 2003-2018.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Kohei Yamada. Retrieved from https://idiyas.com/inventor/kohei-yamada-fhpr25mk

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Calculating rank
USPTO Granted Patents = 6

% Patents Active = 33.3

Average Co-Inventor Count = 1.2

ph-index = 3

Forward Citations = 23(Granted Patents)


Location History:

  • Tochigi, JP (2004 - 2005)
  • Utsunomiya, JP (2003 - 2018)

Company Filing History:

goldMedal6 out of 93,136 
 
Canon Kabushiki Kaisha
 patents

Years Active: 2003-2018

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6 patents (USPTO):Explore Patents
1. 9972522 - Processing apparatus and device manufacturing method (2018-05-15),
2. 8531649 - Exposure apparatus and device fabrication method (2013-09-10),
3. 6930762 - Master transport apparatus (2005-08-16),
4. 6811369 - Semiconductor fabrication apparatus, pod carry apparatus, pod carry method, and semiconductor device production method (2004-11-02),
5. 6642997 - Substrate conveying system in exposure apparatus (2003-11-04),
6. 6573979 - Cleaning method for use in exposure apparatus (2003-06-03),

Title: Kohei Yamada: Innovator in Processing Apparatus Technology

Introduction

Kohei Yamada is a prominent inventor based in Utsunomiya, Japan. He has made significant contributions to the field of processing apparatus technology, holding a total of 6 patents. His work focuses on enhancing the efficiency and effectiveness of substrate processing methods.

Latest Patents

Yamada's latest patents include innovative technologies that address critical challenges in device manufacturing. One of his notable inventions is a processing apparatus designed for processing a substrate chucked by a chuck installed on a stage. This apparatus features a conveying unit that transports the substrate to the chuck, a robot that selectively conveys a pressing member to reduce substrate warp, and a cleaning member for maintaining the chuck surface. The controller orchestrates the operations of the robot to ensure precise processing and cleaning.

Another significant patent is an exposure apparatus that includes a light shielding plate strategically placed in the illumination optical system. This apparatus is designed to detect shifts between the substrate's center position and the array of shot regions, allowing for accurate positioning of the light shielding plate. This innovation enhances the precision of pattern transfer onto substrates, which is crucial in device fabrication.

Career Highlights

Kohei Yamada is currently employed at Canon Kabushiki Kaisha, a leading company in imaging and optical products. His work at Canon has allowed him to develop cutting-edge technologies that contribute to the advancement of the industry. Yamada's expertise in processing apparatus has positioned him as a key figure in the field.

Collaborations

Yamada collaborates with fellow inventor Shinichi Hirano, working together to push the boundaries of technology in their respective fields. Their partnership has led to the development of innovative solutions that address complex challenges in device manufacturing.

Conclusion

Kohei Yamada's contributions to processing apparatus technology and his innovative patents have made a significant impact on the industry. His work continues to inspire advancements in device manufacturing, showcasing the importance of innovation in technology.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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