The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2005
Filed:
Jan. 22, 2004
Kohei Yamada, Tochigi, JP;
Kohei Yamada, Tochigi, JP;
Canon Kabushiki Kasiha, Tokyo, JP;
Abstract
An exposure apparatus has a mask stage (), a prealignment device () which prealigns a mask () to be transferred to the stage (), and a manipulating mechanism () which transports a master or exchanges two masters between the stage () and prealignment device (). A master transport apparatus () includes a mask transport mechanism () which holds the mask () with holding portions () that can hold at least two masks () and transports the master (), and a controller () which controls the transport mechanism (). The controller () controls the transport mechanism () such that, when a mask () that should be used in a first turn for exposure is to be mounted on the stage (), a mask () to be used in a second turn is provided to the prealignment device (), and a mask () to be used in a third turn is held by the holding portion ().
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile