The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 6642997 B1

PDF
Full Text
Expired
Date of Patent:
Nov. 04, 2003

Filed:

Jun. 25, 2001
Applicant:
Inventor:

Kohei Yamada, Utsunomiya, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03B 2/762 ; G03B 2/742 ; G65G 4/907 ;
U.S. Cl.
CPC ...
G03B 2/762 ; G03B 2/742 ; G65G 4/907 ;
Abstract

A substrate conveying system for conveying a substrate contained in an accommodating container having a supporting member for supporting the substrate. The system includes a hand for holding the substrate, a driving mechanism for moving the hand toward and away from the container, along a direction approximately parallel to the surface of the substrate, the driving mechanism being operable to move the hand to below the substrate, an elevation mechanism for moving the hand relative to the container, along a direction approximately perpendicular to the surface of the substrate, the elevation mechanism being operable to move the hand upwardly relative to the supporting member, for transfer of the substrate from the supporting member to the hand, and an obstacle detecting system for detecting the presence/absence of an obstacle within a movement range of the hand defined by the driving mechanism. The obstacle detecting system is movable in the movement direction of the hand defined by the elevation mechanism, and is operable also to detect the presence/absence of an obstacle within a movement range of the hand defined by the elevation mechanism.


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Yamada, Kohei. (2003). Substrate conveying system in exposure apparatus (U.S. Patent No. 6642997). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6642997

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