The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 03, 2003
Filed:
Feb. 11, 1999
Kohei Yamada, Utsunomiya, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
An exposure apparatus includes a chuck having a holding surface for holding a substrate, a stage for holding the chuck, a moving mechanism for moving the stage, an urging mechanism for holding a whetstone and for urging the whetstone against the holding surface, a conveying mechanism for conveying the whetstone to the urging mechanism, and relay pins, retractably protruding from the holding surface. The relay pins, when protruding from the holding surface, are operable to relay the whetstone between the urging mechanism and the conveying mechanism. The stage is moved while the whetstone is urged against to the holding surface, for cleaning the holding surface.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile