Location History:
- Yokkaichi, JP (2002)
- Tokyo, JP (2003)
- Chuo-ku, JP (2008 - 2009)
Company Filing History:
3 out of 1,058 
1 out of 832,880 Years Active: 2002-2009
Title: Kiyonobu Kubota: Innovator in Semiconductor Cleaning Technologies
Introduction
Kiyonobu Kubota is a prominent inventor based in Chuo-ku, Japan. He has made significant contributions to the field of semiconductor technology, particularly in cleaning compositions and methods. With a total of 4 patents to his name, Kubota's work has had a substantial impact on the efficiency and effectiveness of semiconductor manufacturing processes.
Latest Patents
Kubota's latest patents include innovative solutions such as a cleaning composition that comprises organic polymer particles with a crosslinked structure and a surfactant. This cleaning composition is specifically designed for use after chemical mechanical polishing of semiconductor substrates. Additionally, he has developed a method for cleaning semiconductor substrates that utilizes this cleaning composition effectively. Another notable patent involves a process for manufacturing semiconductor devices, which includes steps for chemically and mechanically polishing a semiconductor substrate followed by cleaning it using the aforementioned method. Furthermore, he has disclosed a chemical mechanical polishing aqueous dispersion that combines two types of fumed silica, enhancing the polishing process while minimizing damage to insulating film materials.
Career Highlights
Throughout his career, Kiyonobu Kubota has worked with notable companies, including JSR Corporation. His expertise in semiconductor technology has allowed him to develop innovative solutions that address critical challenges in the industry.
Collaborations
Kubota has collaborated with esteemed colleagues such as Masayuki Hattori and Nobuo Kawahashi. These partnerships have contributed to the advancement of semiconductor cleaning technologies and have fostered a collaborative environment for innovation.
Conclusion
Kiyonobu Kubota's contributions to semiconductor cleaning technologies exemplify his dedication to innovation in the field. His patents reflect a deep understanding of the complexities involved in semiconductor manufacturing, and his work continues to influence the industry positively.