Company Filing History:

8 out of 10,295

Tokyo Electron Limited

Kabushiki Kaisha Toshiba

patents

where one patent can have more than one assignee

Years Active: 2001-2012

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8 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 8122850 - Method and apparatus for processing polysilazane film (2012-02-28),

2. 7926445 - Oxidizing method and oxidizing unit for object to be processed (2011-04-19),

3. 7700156 - Method and apparatus for forming silicon oxide film (2010-04-20),

4. 7563481 - Method and apparatus for processing polysilazane film (2009-07-21),

5. 7304003 - Oxidizing method and oxidizing unit for object to be processed (2007-12-04),

6. 7064084 - Oxide film forming method (2006-06-20),

7. 6869892 - Method of oxidizing work pieces and oxidation system (2005-03-22),

8. 6245673 - Method of forming tungsten silicide film (2001-06-12),

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