Location History:
- Nirasaki, JP (2008)
- Kurokawa-gun, JP (2016)
- Miyagi, JP (2014 - 2019)
Company Filing History:
Years Active: 2008-2019
Title: Kimihiro Fukasawa: Innovator in Plasma Processing Technology
Introduction
Kimihiro Fukasawa is a notable inventor based in Miyagi, Japan. He has made significant contributions to the field of plasma processing technology, holding a total of 5 patents. His work focuses on improving temperature control methods and apparatuses used in plasma processing.
Latest Patents
Fukasawa's latest patents include a temperature control method, control apparatus, and plasma processing apparatus. The temperature control method is designed to manage the temperature settings for each step of a multi-step plasma process. This method involves a transfer step for moving a workpiece into and out of the processing chamber, a process execution step for carrying out the plasma process, and a temperature control step that includes both first and second temperature controls. The first control adjusts the temperature to the next process setting after the current step is completed, while the second control manages the temperature in parallel with the entry and exit processes. Additionally, his plasma processing apparatus features a recipe storing unit, a compensation setting unit, and a storage unit that collectively enhance the uniformity of plasma processing across substrates.
Career Highlights
Fukasawa is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and flat panel display manufacturing equipment industry. His innovative work has positioned him as a key figure in advancing plasma processing technologies.
Collaborations
Fukasawa has collaborated with notable colleagues such as Kazuhiro Kanaya and Wataru Ozawa. Their combined expertise has contributed to the development of advanced plasma processing solutions.
Conclusion
Kimihiro Fukasawa's contributions to plasma processing technology through his innovative patents and collaborations highlight his importance in the field. His work continues to influence advancements in temperature control methods and apparatuses, showcasing the impact of his inventions on the industry.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.