The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 05, 2008
Filed:
Apr. 16, 2004
Noriaki Shimizu, Nirasaki, JP;
Kimihiro Fukasawa, Nirasaki, JP;
Kazuhiro Kanaya, Nirasaki, JP;
Jun Shoji, Miyagi-gun, JP;
Noriaki Shimizu, Nirasaki, JP;
Kimihiro Fukasawa, Nirasaki, JP;
Kazuhiro Kanaya, Nirasaki, JP;
Jun Shoji, Miyagi-gun, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A substrate processing system allows to reduce the number of works that should be done by a software engineer. The systemincludes a substrate processing apparatus; a substrate processing controllerfor controlling the substrate processing apparatus; and a serverfor storing therein commands, i.e., instructional statements, for defining an operation of each device. The substrate processing controllerhas a RAMserving as a work space for creating a macro file corresponding to each of processes divided from the whole substrate processing or for changing the content of a macro file; and an executorcomposed of, e.g., CPU for executing a process sequence macro obtained by a combination of the created macro files. The user creates a macro file describing a sequential operation of each process or changes the content of a macro file by arranging the stored commands.