Location History:
- Nirasaki, JP (2008)
- Miyagi, JP (2014)
- Kurokawa-gun, JP (2016)
Company Filing History:
Years Active: 2008-2016
Title: Kazuhiro Kanaya: Innovator in Plasma Processing Technology
Introduction
Kazuhiro Kanaya is a notable inventor based in Kurokawa-gun, Japan. He has made significant contributions to the field of plasma processing technology, holding a total of 3 patents. His work focuses on improving the efficiency and uniformity of plasma processing, which is crucial in various industrial applications.
Latest Patents
Kanaya's latest patents include a plasma processing apparatus, a plasma processing method, and a storage medium. The plasma processing apparatus is designed as a parallel flat-panel type and features a recipe storing unit that holds processing recipes for plasma processing. It also includes a compensation setting unit that allows for the adjustment of the accumulation time of the plasma processing or the number of processed substrates after the introduction of a new second electrode. Additionally, it stores the compensated set value in a dedicated storage unit. This innovative apparatus is equipped with a program that controls a temperature adjusting mechanism based on a set temperature after compensation. By adding the set temperature of an upper electrode, as specified in the processing recipe, to the compensation value stored in the storage unit, the apparatus effectively suppresses non-uniformity in plasma processing caused by changes in the processing atmosphere.
Career Highlights
Kazuhiro Kanaya is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work at the company has allowed him to develop and refine his innovative technologies, contributing to advancements in plasma processing.
Collaborations
Throughout his career, Kanaya has collaborated with notable coworkers, including Kimihiro Fukasawa and Tatsuya Ogi. These collaborations have fostered a creative environment that encourages innovation and the development of cutting-edge technologies.
Conclusion
Kazuhiro Kanaya's contributions to plasma processing technology highlight his role as a significant inventor in the field. His innovative patents and work at Tokyo Electron Limited demonstrate his commitment to advancing technology and improving industrial processes.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.