Company Filing History:
Years Active: 2022-2025
Title: KiKang Kim: Innovator in Gas-Phase Reactor Systems
Introduction
KiKang Kim is a prominent inventor based in Yongin-si, South Korea. He has made significant contributions to the field of semiconductor technology and gas-phase reactor systems. With a total of 5 patents to his name, Kim continues to push the boundaries of innovation in his industry.
Latest Patents
One of KiKang Kim's latest patents is a gas-phase reactor system that includes a gas detector. This invention discloses methods and systems for performing leak checks of gas-phase reactor systems. The exemplary system features a first exhaust system coupled to a reaction chamber via a first exhaust line, along with a bypass line connected to a gas supply unit and the first exhaust system. A gas detector is integrated into the bypass line through a connecting line, which also includes a connecting line valve and a second exhaust system. The methods outlined in this patent involve using the second exhaust system to exhaust the connecting line, effectively removing residual gas that could affect the gas detector's accuracy.
Another notable patent by Kim is a method for filling a gap in a three-dimensional structure on a semiconductor substrate. This application details a process that includes depositing a thin film on a three-dimensional structure over a substrate using at least one reaction gas activated with a first radio frequency (RF) power. The method also involves etching the deposited thin film with an etchant activated by a second RF power, which is lower than the first frequency. This cycle of depositing and etching is repeated until the trench or hole is filled with the thin film, resulting in a structure that is substantially free of voids and seams.
Career Highlights
KiKang Kim is currently employed at ASM IP Holding B.V., where he continues to develop innovative technologies in the semiconductor field. His work has been instrumental in advancing the efficiency and effectiveness of gas-phase reactor systems.
Collaborations
Throughout his career, Kim has collaborated with notable colleagues, including SeungHwan Lee and HakYong Kwon. These partnerships have contributed to the successful development of his patented technologies.
Conclusion
KiKang Kim is a dedicated inventor whose work in gas-phase reactor systems and semiconductor technology has led to significant advancements in the field. His innovative patents reflect his commitment to excellence and his impact on the industry.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.