Location History:
- Esashi, JP (1999)
- Tokyo, JP (2005)
- Oshu, JP (2010 - 2019)
- Iwate, JP (2016 - 2020)
Company Filing History:
Years Active: 1999-2020
Title: Innovator Kiichi Takahashi and His Contributions to Substrate Processing
Introduction
Kiichi Takahashi is an esteemed inventor based in Oshu, Japan, known for his innovative contributions to substrate processing technologies. With an impressive portfolio of 16 patents, Takahashi has made significant strides in the field, particularly through his latest inventions aimed at enhancing film deposition processes on various substrates.
Latest Patents
Takahashi's latest patents include a groundbreaking substrate processing apparatus and method. This apparatus is designed to deposit a film, which comprises a reaction product, onto a substrate by implementing a supply cycle of at least two types of reaction gases that react with each other. This process is executed in a chamber that includes a turntable with a specially designed concave portion for receiving the substrate, as well as through-holes to facilitate substrate handling. The mechanism also features a lifting system with lift pins that assist in transferring the substrate, all controlled by an advanced control unit that manages the vertical and radial movements of the lifting pins.
Another notable patent outlines a support structure for a suspended injector used in conjunction with the substrate processing apparatus. This structure includes a tubular vertical portion and chamfered elements that ensure stability and efficiency during operation. The design emphasizes the importance of precise structural support, which is critical for maintaining the functionality of the suspended injector.
Career Highlights
Currently, Kiichi Takahashi is employed at Tokyo Electron Limited, a leader in the semiconductor manufacturing equipment industry. His role has allowed him to pioneer various technologies that are essential in the production of high-performance electronic components. Through his innovations, he has greatly contributed to the advancement of substrate processing techniques.
Collaborations
Throughout his career, Takahashi has shared his expertise with talented colleagues, including Yo Abe and Junya Sato. Their collaborative efforts reflect a strong team dynamic that fosters creativity and enhances the development of innovative solutions in substrate processing.
Conclusion
Kiichi Takahashi stands out as a significant figure in the realm of substrate processing inventions. His 16 patents underscore his dedication to innovation and highlight his critical role at Tokyo Electron Limited. By continuing to push the boundaries in substrate processing technology, Takahashi exemplifies the spirit of invention and the ongoing evolution of semiconductor manufacturing processes.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.