The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 25, 2005
Filed:
Mar. 27, 2003
Katsuya Toba, Tokyo, JP;
Kiichi Takahashi, Tokyo, JP;
Mitsuru Obara, Tokyo, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A vertical heat-processing apparatus () includes a vertical heat-processing furnace () having a furnace port (), a lid () movable up and down to open and close the furnace port, and a rotation mechanism () disposed on the lid to rotate a holder () that holds a number of target substrates (W). The rotation mechanism () includes a rotary shaft (), and a support unit () that supports the rotary shaft () rotatably through a bearing () and sealing member (). The rotary shaft () has a hollow structure with a thin wall, and is supplied with a cooling gas to flow inside and outside the rotary shaft. The support unit () has a cooling passage () surrounding an upper portion of the rotary shaft (), and is supplied with a coolant to flow through the cooling passage.