The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 22, 2012
Filed:
Oct. 14, 2008
Katsuyuki Hishiya, Oshu, JP;
Kiichi Takahashi, Oshu, JP;
Haruoki Nakamura, Oshu, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A workpiece transfer mechanismtransfers workpieces W to a workpiece boathaving ringlike tables. The transfer mechanismincludes a fork main bodybeing movable forward and rearward with the workpiece W placed thereon; stopper membersprovided at the end portion of the fork main body; clamp meansprovided on the proximal end side of the fork main bodyand having a pressing portioncoming into contact with the circumferential edge of the workpiece W and pressing the workpiece W toward the stopper memberfor clamping; and fork elevating meansfor lifting and lowering the fork main body. When the workpieces W are transferred to a workpiece boat, the pressing portionof the clamp meansis controlled so as not to be inserted into a gap between tables. Thus, although the pitch between the tablesis small, the pressing portionof the clamp meansdoes not interfere with the workpiece boat