Processing system for process object and thermal processing method for process object

Abstract

To provide a processing system for a process object capable of preventing a transport arm mechanism from being thermally damaged, so as to effectively perform a transport operation of the process object. A processing system, which takes out a process object W from a storage boxfor process object, and thermally process the process object, includes: a vertical processing unit; a process-object transport areadisposed below the processing unit; a plurality of process-object boatsconfigured to hold the process objects; a boat elevating meansconfigured to vertically move the process-object boat; a boat table for transport, on which the process-object boat can be placed; and a transport arm mechanism configured to transport the process objects between the storage boxand the process-object boatplaced on the boat table for transport. The transport arm mechanismis vertically moved by an arm elevating means. A temperature measuring meansis disposed in an upper part in the process-object transport area. The transport arm mechanismand the arm elevating meansare controlled by a transport control partbased on a measured value of the temperature measuring means, so that a transport operation of the transport arm mechanism is controlled.