Hsinchu, Taiwan

Kevin Huang

USPTO Granted Patents = 8 

Average Co-Inventor Count = 5.9

ph-index = 3

Forward Citations = 814(Granted Patents)


Location History:

  • Hinschu, TW (2019)
  • Hsinchu, TW (2017 - 2024)

Company Filing History:


Years Active: 2017-2024

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8 patents (USPTO):Explore Patents

Title: The Innovative Contributions of Kevin Huang

Introduction

Kevin Huang is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of technology, particularly in the area of lithography systems. With a total of eight patents to his name, Huang's work has had a substantial impact on the semiconductor industry.

Latest Patents

Huang's latest patents focus on advanced mask cleaning technologies. One of his notable inventions is an apparatus that includes a vacuum chamber and a reflective optical element designed to reflect extreme ultra-violet (EUV) light. This apparatus features a cleaning module that provides a mitigation gas and a hydrogen-containing gas to prevent contamination of the reflective optical element through chemical reactions. Another significant patent involves a lithography system that integrates a first load lock chamber for mask reception, a cleaning module for mask cleaning, and a second load lock chamber for wafer reception. This innovative design allows for a direct path between the first load lock chamber and the exposure module, enhancing efficiency in the lithography process.

Career Highlights

Throughout his career, Kevin Huang has worked with leading companies in the semiconductor industry, including Taiwan Semiconductor Manufacturing Company and BASF SE Corporation. His experience in these organizations has allowed him to develop and refine his innovative ideas, contributing to advancements in technology.

Collaborations

Huang has collaborated with notable colleagues such as Shu-Hao Chang and Kuo-Chang Kau. These partnerships have fostered a creative environment that has led to the development of groundbreaking technologies.

Conclusion

Kevin Huang's contributions to the field of technology, particularly in lithography systems and mask cleaning, demonstrate his innovative spirit and dedication to advancing the semiconductor industry. His patents reflect a commitment to solving complex challenges and improving manufacturing processes.

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