Kevin Eduard Heidrich

Title: Kevin Eduard Heidrich: Innovator in Calibration and Logic Structures

Introduction

Kevin Eduard Heidrich is a notable inventor based in Beaverton, OR (US). He has made significant contributions to the fields of calibration and logic structures, holding a total of 5 patents. His work has been instrumental in advancing technologies that enhance measurement accuracy and efficiency.

Latest Patents

One of Heidrich's latest patents is titled "Multi-layer calibration for empirical overlay measurement." This invention focuses on determining overlay for a device using signals measured from the device and a signal response derived from multiple calibration targets. Each calibration target is designed similarly to the device but includes a known overlay shift. The calibration targets can be positioned in various locations, including a scribe line or on a separate calibration wafer. The overlay shift can occur in two orthogonal directions, and the device may also serve as a calibration target with zero overlay shift.

Another significant patent is the "Effective cell approximation model for logic structures." This invention determines the characteristics of a standard logic cell using an effective cell approximation that is smaller than the standard logic cell. The effective cell approximation represents the density of lines and spaces of the standard logic cell and can be produced based on a selected area from the standard logic cell. This model allows for accurate measurements and comparisons to determine the characteristics of standard logic cells.

Career Highlights

Heidrich has worked with prominent companies in the industry, including Nanometrics Inc. and Onto Innovation Inc. His experience in these organizations has contributed to his expertise in calibration and logic structures.

Collaborations

Throughout his career, Heidrich has collaborated with notable individuals such as Nicholas James Keller and Nigel Peter Smith. These collaborations have further enriched his work and innovations in the field.

Conclusion

Kevin Eduard Heidrich is a distinguished inventor whose contributions to calibration and logic structures have made a significant impact in the industry. His innovative patents and career achievements reflect his dedication to advancing technology and improving measurement accuracy.