Kumamoto, Japan

Kento Tsukano

USPTO Granted Patents = 6 

Average Co-Inventor Count = 6.6

ph-index = 2

Forward Citations = 10(Granted Patents)


Location History:

  • Kumamoto, JP (2019 - 2021)
  • Koshi, JP (2021)

Company Filing History:


Years Active: 2019-2021

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6 patents (USPTO):Explore Patents

Title: Kento Tsukano: Innovator in Substrate Processing Technologies

Introduction

Kento Tsukano is a prominent inventor based in Kumamoto, Japan. He has made significant contributions to the field of substrate processing, holding a total of 6 patents. His work focuses on innovative methods that enhance the efficiency and effectiveness of substrate processing systems.

Latest Patents

Tsukano's latest patents include a substrate processing method, a recording medium, and a substrate processing system. In his substrate processing method, he describes a liquid film forming process where a processing liquid is supplied onto the surface of a substrate while it is rotated at a specific speed. This method includes a supply stopping process and a liquid amount adjusting process to optimize the liquid film on the substrate. Additionally, he has developed a method for cleaning substrate processing apparatuses, which involves using a supercritical fluid to dry substrates that have been wetted by a liquid. This method incorporates a cleaning gas filling process and an exhausting process to ensure thorough cleaning.

Career Highlights

Kento Tsukano is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His innovative approaches have contributed to advancements in substrate processing technologies, making him a valuable asset to his organization.

Collaborations

Tsukano has collaborated with notable colleagues such as Gentaro Goshi and Keisuke Egashira. Their teamwork has fostered an environment of innovation and creativity, leading to the development of cutting-edge technologies in their field.

Conclusion

Kento Tsukano's contributions to substrate processing technologies highlight his role as a key inventor in the industry. His innovative patents and collaborative efforts continue to drive advancements in semiconductor manufacturing.

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