The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 10, 2019
Filed:
Nov. 16, 2017
Tokyo Electron Limited, Tokyo, JP;
Hiroki Ohno, Kumamoto, JP;
Keisuke Egashira, Kumamoto, JP;
Gentaro Goshi, Kumamoto, JP;
Yosuke Kawabuchi, Kumamoto, JP;
Shotaro Kitayama, Kumamoto, JP;
Hiroshi Marumoto, Kumamoto, JP;
Takuro Masuzumi, Kumamoto, JP;
Kento Tsukano, Kumamoto, JP;
Hiromi Kiyose, Kumamoto, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
During at least part of a time period for a pressure increasing step of increasing a pressure inside a processing container from a pressure lower than a critical pressure of a processing fluid to a pressure higher than the critical pressure, pressure increasing is performed by supplying the processing fluid into the processing container from a fluid supply source while discharging the processing fluid from the processing container at a controlled discharge flow rate. Particles attached to the surfaces of members inside the processing container travel upward by the supply of the processing fluid into the processing container from the fluid supply source. The particles are discharged along with the processing fluid from the processing container.