Kenji Matsuda

Title: Kenji Matsuda: Innovator in Semiconductor Technology

Introduction

Kenji Matsuda, an accomplished inventor based in Nirasaki, Japan, has made significant contributions to the field of semiconductor technology. With a total of two patents to his name, Matsuda is recognized for his innovative approaches in developing enhanced semiconductor devices and manufacturing methods.

Latest Patents

Matsuda's latest inventions include a groundbreaking semiconductor device and a method for manufacturing such devices. The semiconductor device features a heat-dissipating mechanism, which incorporates a semiconductor chip capable of generating heat or functioning as a semiconductor relay substrate that houses integrated circuits or wiring. The device employs a sintered-silver-coated film adhered to the semiconductor substrate and interposed with a silicon oxide film. A crucial component, the heat-dissipating fin, typically made from copper or aluminum, is bonded onto the sintered-silver-coated film using an adhesive layer.

In his method of manufacturing semiconductor devices, Matsuda outlines a procedure that begins with forming a hole that penetrates a substrate to reach an electrode on the opposite side. This process involves creating an organic insulating film inside the hole, selectively removing part of the film to expose the electrode, and cleaning the exposed electrode surface using inert gas plasma. The process culminates in filling the hole with a conductive metal and applying oxygen plasma to remove residual organic insulating film, followed by annealing the substrate in a dysoxidative atmosphere.

Career Highlights

Throughout his career, Matsuda has worked with notable companies, including Tanaka Kikinzoku Kogyo Co., Ltd. and Tokyo Electron Limited. His experience in these esteemed organizations has allowed him to hone his skills and push the boundaries of semiconductor technology.

Collaborations

Matsuda has collaborated with talented individuals such as Dai Shinozaki and Yuichi Makita. Their joint efforts have contributed to the advancement of semiconductor innovations, further establishing Matsuda's reputation in the field.

Conclusion

Kenji Matsuda's inventive spirit and dedication to semiconductor technology have resulted in significant advancements, as reflected in his patents. His work continues to impact the industry, making him a noteworthy figure among inventors in this ever-evolving field.