The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 06, 2014
Filed:
Apr. 04, 2011
Kippei Sugita, Nirasaki, JP;
Kenji Matsuda, Nirasaki, JP;
Hiroyuki Hashimoto, Nirasaki, JP;
Muneo Harada, Nirasaki, JP;
Kippei Sugita, Nirasaki, JP;
Kenji Matsuda, Nirasaki, JP;
Hiroyuki Hashimoto, Nirasaki, JP;
Muneo Harada, Nirasaki, JP;
Tokyo Electron Limited, , JP;
Abstract
The method includes forming a hole penetrating from one surface of a substrate to an electrode formed on the other surface of the substrate; forming an organic insulating film in the hole; removing at least a part of the organic insulating film formed in a bottom portion of the hole and not the organic insulating film formed on a side wall portion of the hole, to expose the electrode; cleaning an exposed surface of the electrode by using plasma of an inert gas; filling a conductive metal in the hole; removing at least a part of a surface of the organic insulating film by the reaction of oxygen plasma; and annealing the substrate in a dysoxidative atmosphere.