Kenji Ago

Title: Kenji Ago: Innovator in Substrate Transfer and Transport Technologies

Introduction

Kenji Ago is a prominent inventor based in Chigasaki, Japan. With an impressive portfolio of four patents, Agu has made significant contributions to the fields of substrate transfer and transport apparatus technologies. His innovative solutions aim to simplify system structures while reducing costs and environmental impact.

Latest Patents

Among his most notable inventions is the **Substrate Transfer Apparatus**, designed to enhance efficiency by minimizing the number of sensors needed to detect substrate positioning. This apparatus effectively transfers a substrate between core and peripheral chambers using a transfer robot equipped with a versatile hand capable of extension, retraction, and pivoting.

Another recent invention is the **Transport Apparatus**, which stands out for its compact design that avoids environmental pollution. This transport system features concentrically arranged rotary shafts and a simplified dead center escaping mechanism, which contributes to a smaller installation area. By optimizing the design, the risk of dust entering the processing chamber is significantly reduced, ensuring cleaner operational conditions.

Career Highlights

Kenji Ago is currently associated with Ulvac, Inc., a leading company in the field of manufacturing high-tech equipment. His work has led to innovations that not only improve efficiency but also address environmental concerns inherent in current technologies.

Collaborations

Throughout his career, Kenji has collaborated with notable colleagues, including Toshio Koike and Hirofumi Minami. Together, they have advanced the frontiers of technology through collaborative research and development efforts.

Conclusion

Kenji Ago's contributions to the fields of substrate transfer and transport apparatuses underscore his status as a key innovator. His patents not only enhance the functionalities of existing systems but also pave the way for more sustainable technological solutions in the industry. With an unwavering commitment to innovation, Ago continues to inspire future advancements in technology.