The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 26, 2013
Filed:
Sep. 22, 2009
Kazuhiro Musha, Chigasaki, JP;
Hirofumi Minami, Chigasaki, JP;
Kenji Ago, Chigasaki, JP;
Takashi Asaishi, Chigasaki, JP;
Toshio Koike, Chigasaki, JP;
Kazuhiro Musha, Chigasaki, JP;
Hirofumi Minami, Chigasaki, JP;
Kenji Ago, Chigasaki, JP;
Takashi Asaishi, Chigasaki, JP;
Toshio Koike, Chigasaki, JP;
Ulvac, Inc., Chigasaki-shi, JP;
Abstract
A compact transport apparatus that does not cause pollution to its environment is provided. In a transport apparatus according to a first aspect of the present invention, an installation area of the apparatus is small because first and second rotary shafts are arranged concentrically, and a dead center escaping mechanism has a simple structure with a small thickness. Since a connecting portion of a hand portion can be made thin, an opening of a gate valve through which the hand portion is inserted can be reduced. As a result, it becomes difficult for dust inside a transport chamber to enter a processing chamber. A second aspect of the present invention is directed to a spaced dual shaft-type transport apparatus. Although the lengths of first arms provided at rotating shafts may differ from the lengths of second arms provided between the first arms and a substrate supporting portion, the apparatus is free from malfunction even when the lengths thereof differ because the transmission of a rotative force of a dead center escaping mechanism is released at a position except at a dead center in the present invention.