The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 12, 2010
Filed:
Jun. 28, 2005
Hirofumi Minami, Chigasaki, JP;
Kenji Ago, Chigasaki, JP;
Takafumi Kawaguchi, Chigasaki, JP;
Toshio Koike, Chigasaki, JP;
Junpei Yuyama, Chigasaki, JP;
Hirofumi Minami, Chigasaki, JP;
Kenji Ago, Chigasaki, JP;
Takafumi Kawaguchi, Chigasaki, JP;
Toshio Koike, Chigasaki, JP;
Junpei Yuyama, Chigasaki, JP;
Ulvac Inc., Chigasaki-shi, JP;
Abstract
A transport apparatus which can properly transmit a rotary driving force of a rotating motor to a transport arm and can correctly detect an angle of rotation of a rotary driving shaft, thereby transporting an object to be transported in a transport unit to a correct position. The transport apparatus includes: a housing having an airtight structure; first to third driving shafts that are provided in the housing to be independently rotatable around a predetermined coaxial rotary shaft; permanent magnets arranged at predetermined positions of the first to third driving shafts, respectively; and electromagnetic coils provided in the housing to correspond to the respective permanent magnets. Driving currents are supplied to the electromagnetic coils based on predetermined information, so as to move the first to third driving shafts. The object to be transported is transported by first and second linkages fixed to the first to third driving shafts.