The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 11, 2009
Filed:
Apr. 01, 2005
Hirofumi Minami, Chigasaki, JP;
Kenji Ago, Chigasaki, JP;
Takafumi Kawaguchi, Chigasaki, JP;
Toshio Koike, Chigasaki, JP;
Junpei Yuyama, Chigasaki, JP;
Hirofumi Minami, Chigasaki, JP;
Kenji Ago, Chigasaki, JP;
Takafumi Kawaguchi, Chigasaki, JP;
Toshio Koike, Chigasaki, JP;
Junpei Yuyama, Chigasaki, JP;
ULVAC Inc., Chigasaki-Shi, JP;
Abstract
A transport apparatus includes first and second linkages. The first linkage includes first and third arms that can be rotated around a coaxial rotary shaft of first through third driving shafts coaxially arranged, and transports a first carrier. The second linkage includes a second arm and the third arm that can be rotated around the coaxial rotary shaft of the first through third driving shafts, and transports a second carrier. The first and second linkages are arranged to allow the first and second carriers to move beyond the coaxial rotary shaft of the first through third driving shafts without interfering with each other.