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Utsunomiya, Japan

Kenichiro Mori

USPTO Granted Patents = 17 (Patent Applications = 1)

Average Co-Inventor Count = 1.2

ph-index = 5

Forward Citations = 70(Granted Patents)

Location History:

Tochigi, JP (2005 - 2006)
Utsunomiya, JP (2002 - 2017)

Company Filing History:

17 out of 90,594

Canon Kabushiki Kaisha

Years Active: 2002-2017

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17 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 9564374 - Forming method and method of manufacturing article (2017-02-07),

2. 9529270 - Lithography apparatus, and method of manufacturing article (2016-12-27),

3. 8760627 - Lithographic apparatus and method of manufacturing article (2014-06-24),

4. 8576378 - Illumination optical system, exposure apparatus, and device manufacturing method (2013-11-05),

5. 7936442 - Exposure apparatus, exposure method, and device fabrication method (2011-05-03),

6. 7771906 - Exposure method (2010-08-10),

7. 7602474 - Exposure apparatus (2009-10-13),

8. 7206060 - Illumination optical system, exposure apparatus, and device fabrication method with a polarizing element and an optical element with low birefringence (2007-04-17),

9. 7130024 - Exposure apparatus (2006-10-31),

10. 7126673 - Illumination optical system and exposure apparatus having the same (2006-10-24),

11. 7027227 - Three-dimensional structure forming method (2006-04-11),

12. 6903801 - Illumination optical system for use in projection exposure apparatus (2005-06-07),

13. 6842224 - Exposure method and apparatus (2005-01-11),

14. 6803991 - Exposure amount control method in exposure apparatus (2004-10-12),

15. 6639652 - Illumination system for use in exposure apparatus (2003-10-28),

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