The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 07, 2005
Filed:
Apr. 03, 2001
Applicant:
Kenichiro Mori, Utsunomiya, JP;
Inventor:
Kenichiro Mori, Utsunomiya, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B027/54 ; G03B027/42 ; G03B027/72 ; G03B027/32 ;
U.S. Cl.
CPC ...
Abstract
Disclosed is an illumination optical system for illuminating a surface, to be illuminated, with use of light from a light source, which includes a diffractive optical element for forming a desired light intensity distribution upon a predetermined plane, and an angular distribution transforming unit for transforming an angular distribution of light incident or to be incident on the diffractive optical element into a desired distribution.
Mori, Kenichiro. (2005). Illumination optical system for use in projection exposure apparatus (U.S. Patent No. 6903801). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6903801
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