Ken Gross

Title: Ken Gross: Innovator in Thermal Management and Overlay Error Detection

Introduction

Ken Gross is a notable inventor based in San Carlos, CA (US), recognized for his contributions to thermal management and overlay error detection technologies. With a total of 2 patents, Gross has made significant strides in enhancing the efficiency and reliability of various systems.

Latest Patents

One of Gross's latest patents is a method and apparatus to reduce thermal stress by regulation and control of lamp operating temperatures. This innovative design features a fluid input manifold that distributes injected fluid around the body of a bulb to cool it below a specified threshold. The injected fluid not only helps in cooling but also ensures even heat distribution along the bulb's surface, thereby reducing thermal stress. The fluid input manifold may include airfoils to direct a laminar fluid flow or a series of fluid injection nozzles to achieve the same effect. Additionally, the output portion is designed to facilitate fluid flow along the bulb's surface, allowing the injected fluid to escape after absorbing heat or applying negative pressure to draw the fluid away.

Another significant patent by Gross involves apparatus and methods for detecting overlay errors using scatterometry. This patent discloses techniques and targets for determining overlay errors between two layers of a sample. The design includes multiple targets, each with unique offsets, illuminated with electromagnetic radiation to obtain spectra. The overlay error is then determined using a linear approximation based on the obtained spectra.

Career Highlights

Throughout his career, Ken Gross has worked with prominent companies such as KLA-Tencor Technologies Corporation and KLA Tencor Corporation. His experience in these organizations has contributed to his expertise in the field of innovation and technology.

Collaborations

Gross has collaborated with notable individuals in the industry, including Walter Dean Mieher and Ady Levy. These collaborations have likely enriched his work and contributed to his innovative projects.

Conclusion

Ken Gross stands out as an inventor whose work in thermal management and overlay error detection has made a significant impact in the field. His patents reflect a commitment to innovation and problem-solving in technology.