The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 2017
Filed:
Aug. 26, 2013
Kla-tencor Corporation, Milpitas, CA (US);
Jincheng Wang, San Jose, CA (US);
Anant Chimmalgi, San Jose, CA (US);
Rajeev Patil, Fremont, CA (US);
Erik Kim, Sunnyvale, CA (US);
Rudolf Brunner, Mountain View, CA (US);
Quang Giang, San Francisco, CA (US);
Lauren Wilson, San Jose, CA (US);
Ken Gross, San Carlos, CA (US);
Ilya Bezel, Sunnyvale, CA (US);
Dan Scott, San Jose, CA (US);
Younus Vora, San Jose, CA (US);
Matthew Derstine, Los Gatos, CA (US);
Cedric Lasfargues, Castro Valley, CA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
A fluid input manifold distributes injected fluid around the body of a bulb to cool the bulb below a threshold. The injected fluid also distributes heat more evenly along the surface of the bulb to reduce thermal stress. The fluid input manifold may comprise one or more airfoils to direct a substantially laminar fluid flow along the surface of the bulb or it may comprise a plurality of fluid injection nozzles oriented to produce a substantially laminar fluid flow. An output portion may be configured to facilitate fluid flow along the surface of the bulb by allowing injected fluid to easily escape after absorbing heat from the bulb or by applying negative pressure to actively draw injected fluid along the surface of the bulb and away.