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For the Inventor, By the Inventor

Hsinchu County, Taiwan

Keith Kuang-Kuo Koai

USPTO Granted Patents = 21 

Average Co-Inventor Count = 4.0

ph-index = 2

Forward Citations = 10(Granted Patents)


Location History:

  • Taoyuan, TW (2016)
  • Zhubei, TW (2017 - 2023)
  • Hsinchu County, TW (2019 - 2024)

Company Filing History:

goldMedal21 out of 40,635 
 
Taiwan Semiconductor Manufacturing Comp. Ltd.
 patents

Years Active: 2016-2025

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21 patents (USPTO):
1. 12472538 - Apparatus for cleaning semiconductor equipment (2025-11-18),
2. 12463019 - Apparatus for fabricating a semiconductor structure and method of fabricating a semiconductor structure (2025-11-04),
3. 12215422 - Shower head structure and plasma processing apparatus using the same (2025-02-04),
4. 12164221 - Extreme ultraviolet light reflective structure including nano-lattice and manufacturing method thereof (2024-12-10),
5. 11859284 - Shower head structure and plasma processing apparatus using the same (2024-01-02),
6. 11762280 - Extreme ultraviolet light reflective structure including nano-lattice and manufacturing method thereof (2023-09-19),
7. 11699574 - Aluminum apparatus with aluminum oxide layer and method for forming the same (2023-07-11),
8. 11517995 - Wet chemical heating system and a method of chemical mechanical polishing (2022-12-06),
9. 11454877 - Extreme ultraviolet light reflective structure including nano-lattice and manufacturing method thereof (2022-09-27),
10. 11443923 - Apparatus for fabricating a semiconductor structure and method of fabricating a semiconductor structure (2022-09-13),
11. 11318506 - Apparatus for cleaning semiconductor equipment (2022-05-03),
12. 11214868 - Chemical vapor deposition apparatus and blocker plate (2022-01-04),
13. 11067515 - Apparatus and method for inspecting a wafer process chamber (2021-07-20),
14. 10876208 - Apparatus and method for fabricating a semiconductor device (2020-12-29),
15. 10868241 - Apparatus for polarizing a semiconductor wafer and method for fabricating a magnetic semiconductor device (2020-12-15),

Title: Innovations and Contributions of Keith Kuang-Kuo Koai

Introduction: Keith Kuang-Kuo Koai is a prominent inventor based in Hsinchu County, Taiwan. With an impressive portfolio of 19 patents, his contributions to the field of semiconductor manufacturing significantly advance technology and innovation.

Latest Patents: Keith's latest patents include groundbreaking inventions such as a shower head structure and a plasma processing apparatus utilizing this structure. This innovative shower head features a plate body with distinct zones, ensuring improved performance with first and second through holes that vary in diameter. Another notable patent is the extreme ultraviolet light reflective structure, incorporating a nano-lattice and a manufacturing method thereof. This invention includes a substrate with multiple pairs of Si and Mo layers, designed for enhanced reflectivity.

Career Highlights: Currently, Keith works with Taiwan Semiconductor Manufacturing Company Ltd., one of the leading companies in semiconductor innovation. His work has had a significant impact on the company's technological advancements and the overall semiconductor industry.

Collaborations: Throughout his career, Keith has collaborated with skilled professionals such as Huan-Chieh Chen and Wen-Hao Cheng. These partnerships have allowed for the exchange of ideas and expertise, further enhancing his research and development efforts.

Conclusion: Keith Kuang-Kuo Koai's inventive spirit and dedication to innovation continue to propel advancements within the semiconductor industry. With numerous patents to his name, he remains a vital contributor to technological progress, inspiring future generations of inventors.

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