Keith Kuang-Kuo Koai

This inventor holds 22 USPTO granted patents and 3 published patent applications, primarily in Semiconductor Fabrication. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 2016-2026.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Keith Kuang-Kuo Koai. Retrieved from https://idiyas.com/inventor/keith-kuang-kuo-koai

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Calculating rank

USPTO Granted Patents = 22 (Patent Applications = 3)

% Patents Active = 95.5

Average Co-Inventor Count = 4.1

ph-index = 2

Forward Citations = 12(Granted Patents)

Location History:

Taoyuan, TW (2016)
Zhubei, TW (2017 - 2023)
Hsinchu County, TW (2019 - 2024)

Company Filing History:

22 out of 42,926

Taiwan Semiconductor Manufacturing Comp. Ltd.

patents

Years Active: 2016-2026

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Areas of Expertise:

Microwave Heating

Infrared Heating

Semiconductor Equipment

Plasma Processing

Extreme Ultraviolet Light

Chemical Vapor Deposition

Wafer Inspection

Metallization Systems

Aluminum Oxide Layer

Nano-Lattice Structures

Chemical Mechanical Polishing

22 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 12521838 - Microwave and infrared heating units for wet chemicals (2026-01-13),

2. 12472538 - Apparatus for cleaning semiconductor equipment (2025-11-18),

3. 12463019 - Apparatus for fabricating a semiconductor structure and method of fabricating a semiconductor structure (2025-11-04),

4. 12215422 - Shower head structure and plasma processing apparatus using the same (2025-02-04),

5. 12164221 - Extreme ultraviolet light reflective structure including nano-lattice and manufacturing method thereof (2024-12-10),

6. 11859284 - Shower head structure and plasma processing apparatus using the same (2024-01-02),

7. 11762280 - Extreme ultraviolet light reflective structure including nano-lattice and manufacturing method thereof (2023-09-19),

8. 11699574 - Aluminum apparatus with aluminum oxide layer and method for forming the same (2023-07-11),

9. 11517995 - Wet chemical heating system and a method of chemical mechanical polishing (2022-12-06),

10. 11454877 - Extreme ultraviolet light reflective structure including nano-lattice and manufacturing method thereof (2022-09-27),

11. 11443923 - Apparatus for fabricating a semiconductor structure and method of fabricating a semiconductor structure (2022-09-13),

12. 11318506 - Apparatus for cleaning semiconductor equipment (2022-05-03),

13. 11214868 - Chemical vapor deposition apparatus and blocker plate (2022-01-04),

14. 11067515 - Apparatus and method for inspecting a wafer process chamber (2021-07-20),

15. 10876208 - Apparatus and method for fabricating a semiconductor device (2020-12-29),

Title: Innovations and Contributions of Keith Kuang-Kuo Koai

Introduction: Keith Kuang-Kuo Koai is a prominent inventor based in Hsinchu County, Taiwan. With an impressive portfolio of 19 patents, his contributions to the field of semiconductor manufacturing significantly advance technology and innovation.

Latest Patents: Keith's latest patents include groundbreaking inventions such as a shower head structure and a plasma processing apparatus utilizing this structure. This innovative shower head features a plate body with distinct zones, ensuring improved performance with first and second through holes that vary in diameter. Another notable patent is the extreme ultraviolet light reflective structure, incorporating a nano-lattice and a manufacturing method thereof. This invention includes a substrate with multiple pairs of Si and Mo layers, designed for enhanced reflectivity.

Career Highlights: Currently, Keith works with Taiwan Semiconductor Manufacturing Company Ltd., one of the leading companies in semiconductor innovation. His work has had a significant impact on the company's technological advancements and the overall semiconductor industry.

Collaborations: Throughout his career, Keith has collaborated with skilled professionals such as Huan-Chieh Chen and Wen-Hao Cheng. These partnerships have allowed for the exchange of ideas and expertise, further enhancing his research and development efforts.

Conclusion: Keith Kuang-Kuo Koai's inventive spirit and dedication to innovation continue to propel advancements within the semiconductor industry. With numerous patents to his name, he remains a vital contributor to technological progress, inspiring future generations of inventors.

Profile summary based on public USPTO records.

Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]

3 patents pending: