The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 06, 2022
Filed:
Jun. 21, 2019
Applicant:
Taiwan Semiconductor Manufacturing Company Ltd., Hsinchu, TW;
Inventors:
Ji James Cui, Hsinchu, TW;
Chia-Hsun Chang, Changhua County, TW;
Chih Hung Chen, Hsinchu, TW;
Liang-Guang Chen, Hsinchu, TW;
Tzu Kai Lin, Tainan, TW;
Chyi Shyuan Chern, Taipei, TW;
Keith Kuang-Kuo Koai, Hsinchu County, TW;
Assignee:
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD., Hsinchu, TW;
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B24B 49/00 (2012.01); B24B 37/015 (2012.01); B24B 57/02 (2006.01); B24B 37/34 (2012.01);
U.S. Cl.
CPC ...
B24B 37/015 (2013.01); B24B 37/34 (2013.01); B24B 57/02 (2013.01);
Abstract
The present disclosure provides a wet chemical heating system, including a first conduit for transporting wet chemical, a dispensing head connected to the first conduit, and a radiative heating element configured to heat the wet chemical in the first conduit and positioned at an upper stream of the dispensing head.