Location History:
- Hyogo, JP (2014)
- Sendai, JP (2014)
- Miyagi, JP (2010 - 2016)
Company Filing History:
Years Active: 2010-2016
Title: Kazuyuki Kato: Innovator in Plasma Processing Technology
Introduction
Kazuyuki Kato is a prominent inventor based in Miyagi, Japan, known for his significant contributions to plasma processing technology. With a total of six patents to his name, Kato has developed innovative methods and apparatuses that enhance the efficiency and effectiveness of plasma processing.
Latest Patents
Kato's latest patents include a plasma processing method and a plasma processing apparatus. In one exemplary embodiment, the plasma processing apparatus introduces energy from microwaves through a dielectric window into a processing container. This apparatus features a central introducing unit and a peripheral introducing unit, where the central introduction port injects gas just below the dielectric window, while the peripheral introduction ports inject gas towards the periphery of the placement region. The central introducing unit connects to multiple first gas sources, including reactive and rare gas sources, through first flow rate control units. The peripheral introducing unit is similarly connected to second gas sources through second flow rate control units. Another patent describes a plasma processing apparatus that includes a flow splitter to divide a common gas into two streams, supplying gas to both the central and peripheral portions of a substrate. This design allows for the addition of an additive gas to enhance processing capabilities.
Career Highlights
Throughout his career, Kazuyuki Kato has worked with notable companies such as Tokyo Electron Limited and NEC Tokin Corporation. His experience in these organizations has allowed him to refine his expertise in plasma processing technologies and contribute to advancements in the field.
Collaborations
Kato has collaborated with esteemed colleagues, including Naoki Matsumoto and Masafumi Shikata. These partnerships have fostered innovation and the sharing of ideas, further enhancing the development of plasma processing technologies.
Conclusion
Kazuyuki Kato's work in plasma processing technology exemplifies the spirit of innovation and dedication to advancing scientific knowledge. His patents and collaborations reflect a commitment to improving industrial processes through cutting-edge technology.