The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 04, 2014
Filed:
Feb. 06, 2009
Naoki Matsumoto, Hyogo, JP;
Kazuyuki Kato, Hyogo, JP;
Masafumi Shikata, Hyogo, JP;
Masaru Sasaki, Hyogo, JP;
Naoki Matsumoto, Hyogo, JP;
Kazuyuki Kato, Hyogo, JP;
Masafumi Shikata, Hyogo, JP;
Masaru Sasaki, Hyogo, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A dielectric plateis provided at a ceiling surface facing a susceptorof a processing chamber, and a slot antennahaving a multiple number of microwave transmissive slotsis provided on a top surface of the dielectric plate. A protrusion memberconfigured as a separate member from the dielectric plateis provided on a peripheral portion of a bottom surface of the dielectric plateso as to prevent an abnormal electric discharge. Electric field intensity in the vicinity of the dielectric plateis controlled by adjusting a gap between an outer peripheral surfaceof a cylindrical part of the protrusion memberand an inner peripheral surfaceof a sidewall of the processing chamberor by adjusting a thickness of the cylindrical part of the protrusion member