This inventor holds 7 USPTO granted patents. Top assignee: Tokyo Electron Limited. Active years: 2015-2019.
Company Filing History:
Years Active: 2015-2019
Title: Kazunori Funazaki: Innovator in Plasma Processing Technology
Introduction
Kazunori Funazaki is a prominent inventor based in Miyagi, Japan. He has made significant contributions to the field of plasma processing technology, holding a total of 7 patents. His innovative work has advanced the capabilities of plasma processing devices and high-frequency generators.
Latest Patents
One of Funazaki's latest patents is a plasma processing device designed to process objects using plasma. This device features a processing container that performs processing within the plasma and a plasma generation mechanism that includes a high-frequency generator located outside the processing container. The high-frequency generator generates high-frequency waves that create plasma in the processing container. Additionally, the generator comprises a high-frequency oscillator and an injection unit that injects a signal into the oscillator, ensuring the signal's frequency matches the fundamental frequency while minimizing different frequency components.
Another notable patent is the microwave automatic matcher and plasma processing apparatus. This invention includes a movable body, a driving unit, a matching control unit, a reflection coefficient measuring unit, and a setting unit. The matching control unit moves the movable body from a start position towards a target position during the plasma process. It variably controls the position of the movable body until the reflection coefficient measurement falls within a specified range.
Career Highlights
Kazunori Funazaki is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work at this organization has allowed him to develop and refine his innovative technologies in plasma processing.
Collaborations
Funazaki has collaborated with notable coworkers, including Kazushi Kaneko and Hideo Kato. Their combined expertise has contributed to the advancement of plasma processing technologies.
Conclusion
Kazunori Funazaki's contributions to plasma processing technology through his patents and work at Tokyo Electron Limited highlight his role as a key innovator in the field. His inventions continue to influence advancements in plasma processing applications.