Location History:
- Beaverton, OR (US) (2012 - 2013)
- Kumamoto, JP (2017 - 2023)
- Koshi, JP (2019 - 2024)
Company Filing History:
Years Active: 2012-2025
Title: Kazuki Kosai: Innovator in Substrate Processing Technology
Introduction
Kazuki Kosai is a prominent inventor based in Kumamoto, Japan. He has made significant contributions to the field of substrate processing technology, holding a total of 12 patents. His innovative work has advanced the efficiency and effectiveness of substrate processing methods.
Latest Patents
Kazuki Kosai's latest patents include a substrate processing apparatus and a substrate processing method that feature an enhanced configuration for replenishing processing liquid. The apparatus consists of a tank for storing processing liquid, a circulation line, a branch line, and a processing part that supplies the processing liquid to a substrate. It also includes a discharge part to reduce the storage amount of the processing liquid and a supply part for introducing new processing liquid into the tank. The controller of the apparatus is equipped with a determination part that assesses the storage amount and a replenishment controller that manages the replenishment process based on calculated values. The substrate processing method involves a series of steps to supply processing and substitute liquids to specific positions on the substrate surface, optimizing the flow rates during the process.
Career Highlights
Kazuki Kosai has built a successful career at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work has been instrumental in developing advanced technologies that enhance substrate processing capabilities. His innovative approaches have positioned him as a key figure in the field.
Collaborations
Kazuki has collaborated with notable coworkers, including Yoshihiro Kai and Fumihiro Kamimura. Their combined expertise has contributed to the development of cutting-edge technologies in substrate processing.
Conclusion
Kazuki Kosai's contributions to substrate processing technology through his patents and work at Tokyo Electron Limited highlight his role as an influential inventor. His innovative methods and apparatus continue to shape the industry and improve processing efficiency.