The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 02, 2024
Filed:
Aug. 05, 2020
Tokyo Electron Limited, Tokyo, JP;
Kazuki Kosai, Koshi, JP;
Yoshihiro Kai, Koshi, JP;
Gentaro Goshi, Koshi, JP;
Hiroshi Komiya, Koshi, JP;
Seiya Fujimoto, Koshi, JP;
Takahisa Otsuka, Koshi, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A substrate processing apparatus includes a substrate holding unitconfigured to hold a substrate W; an outer nozzleconfigured to discharge a processing liquid toward a surface of the substrate from a position at an outside of an outer edge of the substrate held by the substrate holding unit such that at least a central portion of the surface of the substrate is covered with a liquid film of the discharged processing liquid; and an actuator() configured to change a height position or a discharge angle of the outer nozzle.