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For the Inventor, By the Inventor

Miyagi, Japan

Kazuhito Yamada

This inventor holds 7 USPTO granted patents and 6 published patent applications. Top assignee: Tokyo Electron Limited. Active years: 2021-2026.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Kazuhito Yamada. Retrieved from https://idiyas.com/inventor/kazuhito-yamada-8uodwp2d

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Calculating rank
USPTO Granted Patents = 7 

% Patents Active = 85.7

Average Co-Inventor Count = 1.6

ph-index = 1

Forward Citations = 1(Granted Patents)


Company Filing History:

goldMedal7 out of 10,933 
 
Tokyo Electron Limited
 patents

Years Active: 2021-2026

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7 patents (USPTO):Explore Patents
1. 12614703 - Plasma processing method and plasma processing apparatus (2026-04-28),
2. 12562354 - Plasma processing apparatus and temperature controlling method (2026-02-24),
3. 12424416 - Substrate processing apparatus and parameter acquisition method (2025-09-23),
4. 12200826 - Substrate processing apparatus and noise impact reducing method (2025-01-14),
5. 11581168 - Plasma processing apparatus and method (2023-02-14),
6. 11239062 - Plasma processing apparatus with heater and power frequency control (2022-02-01),
7. 10896832 - Substrate processing method and substrate processing apparatus (2021-01-19),

Title: Kazuhito Yamada: Innovator in Substrate Processing Technology

Introduction

Kazuhito Yamada is a prominent inventor based in Miyagi, Japan. He has made significant contributions to the field of substrate processing technology, holding a total of 7 patents. His work focuses on enhancing the efficiency and effectiveness of substrate processing apparatuses.

Latest Patents

Kazuhito Yamada's latest patents include innovative designs for substrate processing apparatuses. One of his notable inventions is a substrate processing apparatus that features a heater resistor and a digital filter. This apparatus is designed to filter detection voltage and current, allowing for precise temperature control of the heater resistor. Another significant patent involves a substrate processing apparatus that incorporates an AD converter. This device outputs digital values of voltage and current, enabling the controller to manage the heater resistor's temperature effectively.

Career Highlights

Kazuhito Yamada is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work at the company has been instrumental in advancing substrate processing technologies. His innovative approaches have garnered attention and respect within the industry.

Collaborations

Kazuhito Yamada has collaborated with notable colleagues, including Hiroki Endo and Takashi Sato. These partnerships have contributed to the development of cutting-edge technologies in substrate processing.

Conclusion

Kazuhito Yamada's contributions to substrate processing technology reflect his dedication and expertise in the field. His innovative patents and collaborations continue to influence advancements in the industry.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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