Kazuhiro Ooya

Title: Kazuhiro Ooya: Innovator in Liquid Processing Technologies

Introduction

Kazuhiro Ooya is a prominent inventor based in Nirasaki, Japan. He has made significant contributions to the field of liquid processing technologies, holding a total of 2 patents. His work focuses on innovative apparatuses and methods that enhance the efficiency and effectiveness of substrate processing.

Latest Patents

Ooya's latest patents include a liquid processing apparatus and method, as well as a recording medium that executes the liquid processing method. The liquid processing apparatus is designed to process a substrate using a processing liquid. It features a substrate holder, a processing liquid supply unit, a rinsing liquid supply unit, and a light-emitting element that emits light absorbed only by the substrate. This innovative design aims to improve the precision and quality of substrate processing. Additionally, his annealing apparatus incorporates heating sources with LEDs that emit light to the wafer, along with light-transmitting members and cooling components made of aluminum. This design enhances the thermal management of the heating sources, ensuring optimal performance.

Career Highlights

Kazuhiro Ooya is associated with Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work at the company has allowed him to develop cutting-edge technologies that are crucial for modern manufacturing processes.

Collaborations

Ooya has collaborated with notable colleagues such as Shigeru Kasai and Masatake Yoneda. Their combined expertise has contributed to the advancement of liquid processing technologies.

Conclusion

Kazuhiro Ooya's innovative contributions to liquid processing technologies demonstrate his commitment to advancing the field. His patents reflect a deep understanding of the complexities involved in substrate processing, making him a valuable figure in the industry.